Comparison ledger
MKS AX 8406 A Ozone, Semitool 003163-000 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 003163-000 SRDSemitool | |
|---|---|---|
| OEM | MKS | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | MKS AX 8406 A Ozone | Semitool 003163-000 SRD |
| Specifications | ||
| Configuration | 50/60 Hz[1] | — |
| Voltage | 208V[1] | — |
| Phase | 3 Phase[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Current | 20A[1] | — |
| Make | — | Semitool[2] |
| Model | — | 003163-000[2] |
| Equipment type | — | Spin Rinse Dryer (SRD)[2] |
| Asset # | — | 139375[2] |
| Last Confirm Date | — | September 03, 2025[2] |
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