MO 1440 A 1 Mechanical

The Lindberg / Blue M MO 1440 A 1 is a mechanical oven. The product name pairs the brand designations Lindberg and Blue M with the model designation MO 1440 A 1.^[1]

Mechanical convection ovens draw air from the chamber into a heating section and return the heated air through the work zone. The motor-driven blower provides forced circulation of air inside the oven. An adjustable temperature controller maintains the chamber at the selected process temperature.

An over-temperature safety device protects the load and the oven in the event of control failure. An exhaust vent allows removal of solvent vapors and decomposition products released during heating. Some mechanical ovens provide a controlled purge of inert gas, such as nitrogen, for processes that require an oxygen-free atmosphere.

Mechanical ovens occupy the lower-temperature portion of thermal processing, complementing high-temperature diffusion furnaces. In a thermal and diffusion process area, batch ovens perform bake and cure steps while furnaces perform oxidation, diffusion, and annealing. Ovens of this class appear in the process flow before or after furnace operations for film drying, solvent removal, and moisture bake-out.

Wafer cleaning lines are followed by oven drying where a mechanical oven removes surface moisture before subsequent processing steps. Polymer coating steps are typically followed by oven cure of the polymer film.

Applications for a mechanical semiconductor oven include baking of photoresist films and removal of residual solvents. The oven is also used for moisture bake-out of substrates and for final drying of cleaned components. Polymer films, adhesives, and encapsulants can be cured in a mechanical convection oven.

Mechanical convection ovens support a variety of materials, including photoresists, polyimides, and other organic films. General thermal conditioning of wafers, substrates, and electronic components is another application.