Lam Research
SEZ 203 Spin
Lam / SEZ 203 is a spin etcher (also called a spin processor) for 8-inch semiconductor wafers. The SEZ 203 is configured for backside clean and cobalt backside clean processes. The SEZ 203 uses Bernoulli wafer handling with a Bernoulli chuck and Bernoulli grippers.[1][2][3]
How it works
The SEZ 203 employs Bernoulli-style wafer handling, including a Bernoulli chuck and Bernoulli grippers, to support the wafer without contact. The SEZ 203 uses a robot handler to transfer wafers. The SEZ 203 includes two open cassettes for wafer input and output. The SEZ 203 has three chemical cabinets for process liquid supply.[3][1][2]
What do the numbers mean?
Wafer handling14
Gas & chemistry3
Control & software2
Configuration & options22
- Process; Backside Clean[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 2004 vintage | — | 2004 | — | Equipment inventory listing[7] |
| 2010 vintage | — | 2010 | — | Equipment inventory listing[1] |
| 1998 vintage | — | 1998 | — | Equipment inventory listing[2] |
| Lam / SEZ 203 Spin Etcher (1998 vintage) | — | 1998 | CIM: SECS/GEM; Process: Cobalt Backside Clean; Handler: Robot; Factory Interface: SMIF (2); Options: UPS | Equipment inventory listing[2] |
| Lam / SEZ 203 Spin Etcher (2004 vintage) | — | 2004 | No additional details specified beyond vintage year | Equipment inventory listing[7] |
| Lam / SEZ 203 Spin Etcher (2010 vintage) | — | 2010 | Software Version: 12.29.09.2000; CIM: GEM; Process: Backside Clean; Handler: Robot; Factory Interface: SMIF (2) | Equipment inventory listing[1] |
| Lam SEZ 203 Spin Processor (8 inch) | — | — | Two open cassettes, 3 chemical cabinets (CDS), Bernoulli wafer handling/chuck/grippers | tech-semi.com[3] |
| SEZ 203 Spin Processing Wet System (200mm) | — | 2001 | 200mm version; vintage date 01.03.2001 | fabsurplus.com[6] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What processes is the SEZ 203 used for?
The SEZ 203 is used for backside cleaning, including a cobalt backside cleaning process.[1][2]
What wafer handling mechanism does the SEZ 203 use?
The SEZ 203 uses Bernoulli chuck and Bernoulli grippers for wafer handling.[3]
How many chemical cabinets does the SEZ 203 have?
The SEZ 203 has three chemical cabinets.[3]
Not publicly documented
The following facts about the SEZ 203 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SEZ 203 Spin are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the SEZ 203 Spin are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SEZ 203 Spin are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SEZ 203 Spin is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SEZ 203 Spin are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (8)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]tech-semi.com — tech-semi.comtech-semi.com
- [4]Inventory photo
- [5]Inventory photo
- [6]fabsurplus.com — fabsurplus.comfabsurplus.com
- [7]Equipment inventory listing
- [8]Equipment inventory listing
Last updated Sep 25, 2026.
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