Lam Research SEZ

Models in this family

1. 

   SEZ 102

   Lam Research SEZ 102 is a semiconductor tool identified with a 6 inch wafer size and 208 Vac, 3 phase, 50/60 Hz electrical specification.

2. SEZ 201 Backside

   The Lam/SEZ 201 Backside Etcher is a backside etching tool for 8-inch wafers.

3. 

   SEZ 203 Spin

   The Lam / SEZ 203 is a spin processor used for wet etching and backside cleaning of 200mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   2004 vintage	—	2004	—	Equipment inventory listing[1]
   2010 vintage	—	2010	—	Equipment inventory listing[2]
   1998 vintage	—	1998	—	Equipment inventory listing[3]
   Lam / SEZ 203 Spin Etcher (1998 vintage)	—	1998	CIM: SECS/GEM; Process: Cobalt Backside Clean; Handler: Robot; Factory Interface: SMIF (2); Options: UPS	Equipment inventory listing[3]
   Lam / SEZ 203 Spin Etcher (2004 vintage)	—	2004	No additional details specified beyond vintage year	Equipment inventory listing[1]
   Lam / SEZ 203 Spin Etcher (2010 vintage)	—	2010	Software Version: 12.29.09.2000; CIM: GEM; Process: Backside Clean; Handler: Robot; Factory Interface: SMIF (2)	Equipment inventory listing[2]
   Lam SEZ 203 Spin Processor (8 inch)	—	—	Two open cassettes, 3 chemical cabinets (CDS), Bernoulli wafer handling/chuck/grippers	tech-semi.com[4]
   SEZ 203 Spin Processing Wet System (200mm)	—	2001	200mm version; vintage date 01.03.2001	fabsurplus.com[5]

4. SEZ 323 Spin

   The SEZ 323 Spin Etcher is a semiconductor etching tool that handles 8- and 12-inch wafers and has two chambers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Lam / SEZ 323 Spin Etcher	—	2002–2002	Listed with vintage year 2002 for asset 142092.	Equipment inventory listing[6]
   2002 Vintage	—	2002–2002	—	Equipment inventory listing[6]
   2005 Vintage	—	2005–2005	—	Equipment inventory listing[7]
   2006 Vintage	—	2006–2006	—	Equipment inventory listing[8]

5. SEZ DV Prime

   The Lam SEZ DV Prime is a 12-inch wet station with 8 chambers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Lam / SEZ DV Prime Wet Station, 12"	—	2010	—	Equipment inventory listing[9]

6. SEZ ES 34
7. SEZ RST 201produced 1997–

   The Lam Research SEZ RST 201 is a semiconductor equipment model described as an 8-inch single cleaning tool.

8. 

   SEZ SP 223 Spin Processing
9. 

   SEZ SP 304

   Lam Research SEZ SP 304 is a single-wafer processing wet cleaning tool stated to handle 8-inch wafers.

Sources