Lam Research
Gasonics VHP Horizontal
The Gasonics VHP is a horizontal furnace used in semiconductor manufacturing. The Gasonics VHP processes wafers up to 8 inches (200 mm) in diameter. The Gasonics VHP requires a 3-phase, 480 V, 80 A, 60 Hz electrical supply.[1][2][3]
What it is
How it works
General reference — not yet source-verifiedA horizontal furnace processes wafers inside a heated tube or process chamber arranged along a horizontal axis.
Horizontal furnace systems are used for thermal and diffusion processing in semiconductor fabrication.
Where it fits in the process flow
General reference — not yet source-verifiedThe Lam Research Gasonics VHP Horizontal belongs in the thermal processing and diffusion portion of wafer fabrication.
The furnace is used after earlier wafer preparation steps and before later device formation steps that depend on controlled heat treatment and dopant movement.
Applications
General reference — not yet source-verifiedHorizontal furnaces are used for heat-driven semiconductor processes that require uniform exposure of wafers to controlled thermal conditions.
Thermal and diffusion furnaces are used for semiconductor wafer processing in mature-node fabrication flows.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Gasonics VHP Horizontal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gasonics VHP Horizontal are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gasonics VHP Horizontal are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gasonics VHP Horizontal are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gasonics VHP Horizontal are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gasonics VHP Horizontal is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Equipment inventory listing
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
Last updated Oct 10, 2026.
Compare with similar tools
View all →The Blue M 0 500 is an oven manufactured by Blue M, with asset number 139866.
