Lam Research

2080 TCU Chiller

Q: What are the operating temperature ranges for the upper and lower channels?

Upper channel: -15 to +80 °C. Lower channel: -20 to +80 °C.

Q: What is the temperature regulation accuracy?

±1 °C (±0.3 °C typical) at rated static load.

Q: What coolant is recommended?

A 50/50 mixture by volume of deionized water and ethylene glycol.

Q: What are the power requirements?

Three-phase 208/230 VAC at 50-60 Hz, 30 A with 10 kA Icu.

Q: How many cooling circuits does each channel have?

Each channel contains three separate cooling circuits: primary, secondary, and tertiary.

Lam Research 2080 TCU Chiller family

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Power

(2) 1A, 250V SLO BLO^[1]

Vacuum

<75 dBA^[1]

Optics

±0.1 °C^[1]

What is it?

The Lam Research 2080 TCU is a dual-channel temperature control unit (chiller) for heating and cooling of upper and lower electrodes in Lam systems.

What do the numbers mean?

Power & electrical3

Power requirements: 3-phase 208/230VAC at 50-60 Hz, 30 A with 10 kA Icu^[1]
Fuses (EMO circuit): (2) 1A, 250V SLO BLO^[1]
Fuses (power supply): (1) 0.75A, 250V SLO BLO^[1]

Vacuum & pumping1

Sound pressure level: <75 dBA^[1]

Optics & imaging1

Setpoint resolution: ±0.1 °C^[1]

Dimensions & facilities5

Height: 55.25 in (140.34 cm)^[1]
Width: 23.75 in (60.33 cm)^[1]
Depth: 37.75 in (95.89 cm)^[1]
Weight (empty reservoirs): 616 lbs (279.42 kg)^[1]
Weight (full reservoirs): 690 lbs (312.98 kg)^[1]

Configuration & options16

Description: Dual Channel Chiller^[1]
Manufacturer: Lam Research^[1]
Model: 2080 TCU^[1]
Upper channel temperature range: -15 to +80 °C^[1]
Lower channel temperature range: -20 to +80 °C^[1]
Temperature regulation: ±1 °C (±0.3 °C typical) at rated static load^[1]
Cooling power (lower channel at -20°C): 1000 W (3415 BTU/hr)^[1]
Cooling power (upper channel at -15°C): 750 W (2561 BTU/hr)^[1]
Heating power (upper/lower channel): 1600 W (5464 BTU/hr)^[1]
Reservoir capacity (per reservoir): 4.23 gallons (16 liters)^[1]
Ambient operating temperature: +10 to +40 °C^[1]
Coolant composition: 50/50 mixture of DI water and ethylene glycol (specific gravity 1.065 ±0.005)^[1]
Refrigerant type: R404A^[1]
CE mark: Yes^[1]
Lam part number: 851-110195-020D^[1]
Country of origin: USA^[1]

Vintage & configurations

1998-01-05Vintage date^[1]
Facilities vintage date stated as 01.05.1998

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Power requirements3-phase 208/230VAC at 50-60 Hz, 30 A with 10 kA Icu^[1]
Fuses (EMO circuit)(2) 1A, 250V SLO BLO^[1]
Fuses (power supply)(1) 0.75A, 250V SLO BLO^[1]
Sound pressure level<75 dBA^[1]

Where are the manuals?

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Field notes

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Frequently asked questions

What are the operating temperature ranges for the upper and lower channels?

Upper channel: -15 to +80 °C. Lower channel: -20 to +80 °C.^[1]

What is the temperature regulation accuracy?

±1 °C (±0.3 °C typical) at rated static load.^[1]

What coolant is recommended?

A 50/50 mixture by volume of deionized water and ethylene glycol.^[1]

What are the power requirements?

Three-phase 208/230 VAC at 50-60 Hz, 30 A with 10 kA Icu.^[1]

How many cooling circuits does each channel have?

Each channel contains three separate cooling circuits: primary, secondary, and tertiary.^[1]

Not publicly documented

The following facts about the 2080 TCU Chiller are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented variants, configuration options, or revision breakpoints of the 2080 TCU Chiller are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 2080 TCU Chiller are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 2080 TCU Chiller are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 2080 TCU Chiller is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 2080 TCU Chiller are on record.
Answerable by: an OEM parts catalog or a service engineer