Comparison ledger
ABM -407B-1-S-CES293 Robot, Lam Research 2080 TCU Chiller, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2080 TCU ChillerLam Research | |
|---|---|---|
| OEM | ABM | Lam Research |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Vintage date |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-1-S-CES293 Robot | Lam Research 2080 TCU Chiller |
| Specifications | ||
| Model | ABM-407B-1-S-CES293[1] | 2080 TCU[2] |
| Description | ROBOT[1] | Dual Channel Chiller[2] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Manufacturer | — | Lam Research[2] |
| Height | — | 55.25 in (140.34 cm)[2] |
| Width | — | 23.75 in (60.33 cm)[2] |
| Depth | — | 37.75 in (95.89 cm)[2] |
| Weight (empty reservoirs) | — | 616 lbs (279.42 kg)[2] |
| Weight (full reservoirs) | — | 690 lbs (312.98 kg)[2] |
| Upper channel temperature range | — | -15 to +80 °C[2] |
| Lower channel temperature range | — | -20 to +80 °C[2] |
| Temperature regulation | — | ±1 °C (±0.3 °C typical) at rated static load[2] |
| Setpoint resolution | — | ±0.1 °C[2] |
| Cooling power (lower channel at -20°C) | — | 1000 W (3415 BTU/hr)[2] |
| Cooling power (upper channel at -15°C) | — | 750 W (2561 BTU/hr)[2] |
| Heating power (upper/lower channel) | — | 1600 W (5464 BTU/hr)[2] |
| Reservoir capacity (per reservoir) | — | 4.23 gallons (16 liters)[2] |
| Ambient operating temperature | — | +10 to +40 °C[2] |
| Coolant composition | — | 50/50 mixture of DI water and ethylene glycol (specific gravity 1.065 ±0.005)[2] |
| Power requirements | — | 3-phase 208/230VAC at 50-60 Hz, 30 A with 10 kA Icu[2] |
| Fuses (EMO circuit) | — | (2) 1A, 250V SLO BLO[2] |
| Fuses (power supply) | — | (1) 0.75A, 250V SLO BLO[2] |
| Sound pressure level | — | <75 dBA[2] |
| Refrigerant type | — | R404A[2] |
| CE mark | — | Yes[2] |
| Lam part number | — | 851-110195-020D[2] |
| Country of origin | — | USA[2] |