KLA

Surfscan SP 1 TBI Particle Defect

Metrology & Inspection KLA Surfscan family

Research Quality: 40% complete

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Surfscan SP 1 TBI Particle Defect — Inventory photo — Fig. 01Surfscan SP 1 TBI Particle DefectInventory photo^[1]

Power

208-240 V^[1]

Optics

12 A (laser)^[1]

What it is

The Surfscan SP 1 TBI supports wafer sizes of 8 and 12 inches. The system operates on 208-240 V single-phase power at 50/60 Hz, with a full load current of 24 A, a main breaker rating of 30 A, and a largest load rating of 12 A for the laser.^[13]^[1]

What do the numbers mean?

Power & electrical4

208-240 V^[1]; Single Phase^[1]; 50/60 Hz^[1]
Input power: 208-240 V, single phase, 50/60 Hz^[1]

Wafer handling4

Single Foup Loader^[3]
Wafer sizes: 8 inch, 12 inch^[13]
Wafer size (single configuration): 12 inch^[3]
Wafer loading: Single FOUP loader^[3]

Optics & imaging2

Rating of Largest Load: 12 A (laser)^[1]; Known Bad Ar Laser^[3]

Configuration & options7

Full Load: 24 A^[1]
Machine Main Breaker Rating: 30 A^[1]
Phase: 1 Phase^[3]
OEM: KLA^[1]
Model: Surfscan SP 1 TBI^[1]
Full load current: 24 A^[1]
Main Breaker Rating: 30 A^[12]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Configuration208-240 V^[1]
ConfigurationSingle Phase^[1]
Configuration50/60 Hz^[1]
Input power208-240 V, single phase, 50/60 Hz^[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What wafer sizes does the KLA Surfscan SP 1 TBI support?

The Surfscan SP 1 TBI supports wafer sizes of 8 inches and 12 inches.^[13]

What are the electrical power requirements for the Surfscan SP 1 TBI?

The system requires 208-240 V single-phase power at 50/60 Hz, with a full load current of 24 A, a main breaker rating of 30 A, and a largest load rating of 12 A for the laser.^[1]

What is the model designation of this particle defect system?

The model is KLA Surfscan SP 1 TBI.^[1]^[13]^[2]^[3]

Not publicly documented

The following facts about the Surfscan SP 1 TBI Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 TBI Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan SP 1 TBI Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan SP 1 TBI Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan SP 1 TBI Particle Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan SP 1 TBI Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report