KLA
Surfscan SP 1 TBI
Plate 01Video 2 of 2 - KLA-Tencor Surfscan SP1 TBI Surface Inspection System (ID# 3728)
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Wafer size
・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil
Power
208-240 V, Single phase[2]
Vacuum
Open Vacuum Chuck Handler (200/300 mm)[2]
Optics
・Laser (in use for 2 years)[2]
What it is
The KLA Surfscan SP 1 TBI is an automated optical inspection system for unpatterned semiconductor wafers. The system is manufactured by KLA-Tencor. The SP1 TBI combines normal and oblique illumination with brightfield capabilities into a single system. The system is designed to meet inspection requirements for sub-0.18 micron devices. The SP1 TBI supports wafer sizes of 200 mm and 300 mm.[2][4][5]
How it works
The Surfscan SP 1 TBI scans the wafer surface with a laser beam. The system combines normal and oblique illumination with a brightfield channel for defect detection. The system can classify scratches longer than 1500 nm as large scratches, while shorter scratches are referred to as microscratches and may appear as light point defects when smaller than the laser spot. The SP1 TBI can distinguish crystal-originated particles (COPs) from surface particles. An optional brightfield (DIC) channel is available.[5][4][2]
Where it fits in the process flow
The Surfscan SP 1 TBI inspects unpatterned semiconductor wafers during the manufacturing flow, providing surface quality and defect information critical for the development and production of sub-0.18 micron devices. The system is particularly suited for detecting CMP-induced defects such as microscratches and chatter marks.[4][5]
Applications
The SP1 TBI can inspect a range of unpatterned surfaces, from bare silicon to extremely rough films. The system distinguishes crystal-originated particles from surface particles. Optional features include haze normalization and haze analysis, XY coordinate mapping, and SECS/GEM communication interfaces for factory integration.[4][2]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil
- Laser in use for 2 years
- CD drive and FD drive damaged
What do the numbers mean?
Power & electrical3
- 50/60 Hz[2]
Vacuum & pumping1
- Open Vacuum Chuck Handler (200/300 mm)[2]
Wafer handling4
- Wafer size
- ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[2]
Optics & imaging3
- ・Laser (in use for 2 years)[2]
Control & software2
Configuration & options14
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Surfscan SP1 | — | — | SP1 is an unpatterned wafer inspection system with proprietary Stationary Beam Technology and an optional brightfield channel based on Nomarski differential interference contrast technology. | web.archive.org[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What handling hardware is mentioned?
One configuration includes an open vacuum chuck handler for 200 mm and 300 mm wafers.[2]
Not publicly documented
The following facts about the Surfscan SP 1 TBI are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan SP 1 TBI are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Surfscan SP 1 TBI are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Surfscan SP 1 TBI is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Surfscan SP 1 TBI are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Surfscan SP 1 TBI are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]web.archive.org — tencor.com (Oct 10, 1999)web.archive.org
- [5]US6590645B1 - System and methods for classifying anomalies of sample surfaces - Google Patents — patents.google.compatents.google.com
- [6]KLA Tencor | Viper 2401 Full Wafer Automated Macro Defect Inspection System - Certified Used Equipment — kla-tencor.com (Jan 8, 2011)web.archive.org
Last updated Sep 28, 2026.
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