KLA

Surfscan 6220 Particle Defect

Metrology & Inspection KLA Surfscan 6220 family

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The KLA Surfscan 6220 Particle Defect is a particle defect system. The KLA Surfscan 6220 Particle Defect is a bare wafer surface defect inspection system. The KLA Surfscan 6220 Particle Defect is wafer capable for 2", 3", 4", 6" and 8" wafers.^[1]^[2]

Surfscan 6220 Particle Defect — Inventory photo — Fig. 01Surfscan 6220 Particle DefectInventory photo^[1]

Performance

100 wph (200 mm) at 0.12 mm^[2]

Optics

30 mW Argon-Ion laser, 488 nm wavelength^[2]

What it is

The KLA Surfscan 6220 Particle Defect is a metrology and inspection system for bare wafer surface defect inspection.^[2]^[9]

How it works

The Surfscan 6220 uses an optical particle inspection approach with laser illumination and automated wafer handling.^[2]^[10]

Where it fits in the process flow

The Surfscan 6220 is used on unpatterned wafers before patterning steps, when bare-surface particle detection can support upstream contamination control and downstream yield monitoring.^[2]^[10]

Applications

The Surfscan 6220 is used for particle inspection on bare silicon and other polished opaque surfaces.^[2]^[10]

What do the numbers mean?

Wafer handling5

Application: bare wafer surface defect inspection system^[2]
Application: surface inspection tool for unpatterned wafers^[10]
Wafer sizes: 2", 3", 4", 6" and 8" wafer capable^[2]
Wafer sizes: 100, 125, 150, and 200mm (round or rectangular substrates)^[10]
Cassette handling: single puck wafer handling from two cassettes (one sender/receiver, one receiver)^[2]

Optics & imaging1

Illumination source: 30 mW Argon-Ion laser, 488 nm wavelength^[2]

Performance3

Repeatability: count repeatability error less than 0.5 percent at 1 standard deviation (mean count greater than 500, 0.364 mm dia. latex spheres)^[2]
Accuracy: count accuracy better than 99 percent (verified with VLSI Standards' Relative Standard)^[2]
Throughput: 100 wph (200 mm) at 0.12 mm^[2]

Control & software1

Operator interface: mouse and/or dedicated user keypad^[2]

Configuration & options12

Cosmetic Modification:^[1]; The Stanley Still monitor and emergency power-off box are removed from the tool^[1]; The monitor and power switch are remote on an adjacent table^[1]
Model: Surfscan 6220^[1]
OEM: KLA^[1]
Category: Metrology & Inspection^[9]
Tool type: particle defect system^[1]
Tool type: particle inspection system^[2]
Sensitivity: 0.09 micrometer diameter PSL sphere equivalent with greater than 80 percent capture rate (0.112um @ 90%)^[2]
Contamination: less than 0.005 particles/cm2 greater than 0.15 mm dia. per single pass^[2]
Cosmetic modification: Stanley Still monitor and emergency power-off box removed from the tool; monitor and power switch remote on an adjacent table^[1]
Vintage: 1995^[1]

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Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

Criticality:

Critical Spare

High

Medium

Consumable

Availability:In ProductionAftermarket OnlyEOL / NLAScarce

Optical

1 tracked part

Laser

Replaced in March of 2020

Aftermarket Only^[11]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the KLA Surfscan 6220 Particle Defect System?

It is a particle defect system in the KLA Surfscan 6220 model line.^[1]

Not publicly documented

The following facts about the Surfscan 6220 Particle Defect are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Surfscan 6220 Particle Defect are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Surfscan 6220 Particle Defect are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Surfscan 6220 Particle Defect are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Surfscan 6220 Particle Defect are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Surfscan 6220 Particle Defect is not on record.
Answerable by: an OEM datasheet or a fab qualification report