KLA
Puma 9130
What it is
How it works
General reference — not yet source-verifiedA metrology and inspection system examines wafers to find defects and measure process-related features. A darkfield defect inspection system directs illumination so that scattered light from particles, scratches, or other anomalies can be detected against a low-background field.
Patterned-wafer inspection systems are used to scan surfaces after lithography or other front-end process steps. Inspection output is then used to decide whether a lot continues, is reworked, or is sent for deeper review.
Where it fits in the process flow
General reference — not yet source-verifiedThe Puma 9130 fits in the inspection and metrology portion of semiconductor manufacturing. The tool is used after patterning or other wafer-forming steps when surface condition and defectivity need to be checked.
Applications
The KLA Puma 9130 is used for patterned wafer inspection. The Puma 9130 family includes darkfield defect inspection applications.[3][4]
What do the numbers mean?
Power & electrical7
- 50/60 Hz[1]
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Puma 9130 Darkfield Defect | — | — | Described as a darkfield defect inspection system. | waferpedia.com[4] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Puma 9130 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Puma 9130 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Puma 9130 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Puma 9130 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Puma 9130 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Puma 9130 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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