Keyence
VHX-7000
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Keyence VHX-7000 is a fully motorised digital microscope for high-resolution inspection of samples up to 8-inch wafers. The Keyence VHX-7000 offers magnification from 20× to 2500× with brightfield and darkfield illumination. The Keyence VHX-7000 features a fully motorised 300 mm XY stage and automatic focusing.[1]
Plate 01Digital Microscope | KEYENCE VHX-7000
KEYENCE CORPORATIONWatch on YouTubePlate 02VHX-7000 changes lenses.
chipsID - What's Inside?Watch on YouTubePlate 03Keyence VHX-7000 Digital Microscope
AmeriCOM-American Center for Optics ManufacturingWatch on YouTube
Wafer size
8-inch wafers
Optics
20× to 2500×[1]
What it is
The Keyence VHX-7000 is a digital microscope used in metrology and inspection.[1]
What do the numbers mean?
Optics & imaging3
Configuration & options3
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Not publicly documented
The following facts about the VHX-7000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the VHX-7000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the VHX-7000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the VHX-7000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the VHX-7000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the VHX-7000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
- [2]Metrology — nanolab.berkeley.edunanolab.berkeley.edu
Last updated Sep 21, 2026.
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