Waferpedia

Hitachi

TM 1000 Tabletop

Metrology & InspectionHitachi TM family
Research Quality: 50% complete

The Hitachi TM 1000 Tabletop is a tabletop scanning electron microscope with magnification from 20x to 10,000x. The TM 1000 uses a high-sensitivity semiconductor backscattered electron detector and a 15kV accelerating voltage. The TM-1000 requires no metal coating for non-conductive samples and provides image observation within three minutes after sample exchange.[1][2]

TM 1000 Tabletop — Inventory photo
Fig. 01TM 1000 TabletopInventory photo[3]

Power

15kV[1]

Vacuum

Quick specimen exchange, quick pump-down[3]

Optics

20 x-10,000 x[3]

What it is

The Hitachi TM 1000 is a tabletop scanning electron microscope (SEM) designed for metrology and inspection applications. The TM 1000 operates with a Windows 10 operating system and provides automatic image adjustment functions.[3][5][6]

The TM 1000 offers magnification from 20x to 10,000x and uses a high-sensitive semiconductor backscattered electron detector. The system features quick specimen exchange and quick pump-down, and can be operated from a laptop computer interface.[3][5][1][2][4]

How it works

The TM 1000 uses backscattered electrons for image formation and operates under a variable-pressure vacuum, which allows observation of non-conductive samples without metal coating. The system includes a charge-up reduction mode to minimize image disturbances from sample charging.[1][2][4]

The electron gun uses a pre-centered cartridge filament with an accelerating voltage of 15 kV. The microscope provides automatic start, autofocus, and automatic brightness/contrast control. The evacuation system consists of a turbomolecular pump (30 L/s) and a diaphragm pump (1 m³/h).[1][2][4]

The TM 1000 can accept samples up to 70 mm in diameter and 20 mm in height. The sample stage provides X=15 mm and Y=18 mm of traverse motion. Image data is captured at 640 × 480 or 1280 × 960 pixels and saved in BMP, TIFF, or JPEG formats.[1][2][4]

Applications

The microscope's ability to observe non-conductive samples without metal coating and its charge-up reduction mode make it particularly useful for materials science, failure analysis, and educational settings where sample preparation must be minimized.[1][2]

What do the numbers mean?

Power & electrical2

Accelerating voltage
15kV[1]
Accurate?
Power source
Single-phase AC 100,110,115,200,220 or 240V(±10%), 500VA[1]
Accurate?

Vacuum & pumping4

Quick specimen exchange, quick pump-down[3]
Accurate?
Evacuation system (vacuum pump)
Turbomolecular pump: 30L/s x 1 unit, Diaphragm pump: 1m3/h x 1 unit[1]
Accurate?
Diaphragm pump dimensions
145(W) x 256(D) x 217(H)mm[1]
Accurate?
Diaphragm pump weight
4.5kg[1]
Accurate?

Optics & imaging3

Magnification
20 x-10,000 x[3]
Accurate?
Magnification
20x-10,000x (digital zoom: 2x, 4x)[1]
Accurate?
Detection system
High-sensitive semiconductor BSE detector[1]
Accurate?

Control & software11

Windows 10 operating system[3]
Accurate?
Easy operation from a laptop computer interface[3]
Accurate?
Image data memory
HDD of PC and other recording medium[1]
Accurate?
Control unit dimensions
140(W) x 564(D) x 513(H)mm[1]
Accurate?
Control unit weight
23.0kg[1]
Accurate?
PC OS
Windows XP Home Edition (SP2)[1]
Accurate?
PC CPU
Intel Celeron M340 or better (or compatible CPU)[1]
Accurate?
PC memory
256MB or larger[1]
Accurate?
PC display
15"[1]
Accurate?
PC interface connector
USB 2.0[1]
Accurate?
Required PC specifications (catalog)
OS Windows XP Home Edition (SP2); CPU Intel Celeron M340 or better; Memory 512MB or larger; Display 15.4 type WXGA 1,280 x 800 pixels; Interface USB 2.0[2]
Accurate?

Dimensions & facilities2

Main unit dimensions
338(W) x 564(D) x 513(H)mm[1]
Accurate?
Main unit weight
58.5kg[1]
Accurate?

Configuration & options17

Auto image adjustment[3]
Accurate?
Observation mode
Standard mode/charge-up reduction mode[1]
Accurate?
Specimen traverse
X:15 mm, Y:18 mm[1]
Accurate?
Maximum sample size
70mm in diameter[1]
Accurate?
Maximum sample thickness
20mm[1]
Accurate?
Electron gun
Pre-centered cartridge filament[1]
Accurate?
Auto image adjustment function
Autostart, Autofocus, AutoBrightness[1]
Accurate?
Frame memory
640 x 480 pixels, 1,280 x 960 pixels[1]
Accurate?
Image format
BMP, TIFF, JPEG[2]
Accurate?
Data display
Micron marker, Micron value, date and time, image number comments[1]
Accurate?
Safety device
Over-current protection function[1]
Accurate?
Installation room temperature
15~30°C[1]
Accurate?
Installation humidity
70%RH or less[1]
Accurate?
Grounding
100Ω or better[1]
Accurate?
Time to image after sample exchange
3 minutes[2]
Accurate?
Power consumption vs predecessor
80% less power consumption than the predecessor[2]
Accurate?
Optional EDX
SwiftED-TM Energy Dispersive X-ray Spectrometer dedicated for TM-1000 Tabletop Microscope[4]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationQuick specimen exchange, quick pump-down[3]
  • Accelerating voltage15kV[1]
  • Evacuation system (vacuum pump)Turbomolecular pump: 30L/s x 1 unit, Diaphragm pump: 1m3/h x 1 unit[1]
  • Diaphragm pump dimensions145(W) x 256(D) x 217(H)mm[1]
  • Diaphragm pump weight4.5kg[1]
  • Power sourceSingle-phase AC 100,110,115,200,220 or 240V(±10%), 500VA[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the magnification range of the TM 1000?

The TM 1000 provides magnification from 20x to 10,000x, with digital zoom options of 2x and 4x.[3][5][1][2][4]

Does the TM 1000 require sample coating for non-conductive materials?

No, the TM 1000 uses variable-pressure vacuum technology that allows observation of non-conductive samples without metal coating.[1][2][4]

What is the accelerating voltage of the electron beam?

The accelerating voltage is fixed at 15 kV.[1][2][4]

What vacuum system does the TM 1000 use?

The evacuation system uses one turbomolecular pump (30 L/s) and one diaphragm pump (1 m³/h).[1][2][4]

What is the maximum sample size the TM 1000 can accommodate?

The TM 1000 can accept samples up to 70 mm in diameter and up to 20 mm in height.[1][2][4]

What operating system does the TM 1000 use?

The TM 1000 operates with Windows 10 operating system.[3][6]

Not publicly documented

The following facts about the TM 1000 Tabletop are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TM 1000 Tabletop are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the TM 1000 Tabletop are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TM 1000 Tabletop are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TM 1000 Tabletop are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TM 1000 Tabletop is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]ietltd.com — ietltd.comietltd.com
  2. [2]elton.freeshell.org — elton.freeshell.orgelton.freeshell.org
  3. [3]Inventory photo
  4. [4]marinereef.com — marinereef.commarinereef.com
  5. [5]TM 1000 Tabletop Scanning Electron Microscope | New Mexico State University | BE BOLD. Shape the Future. — research.nmsu.eduresearch.nmsu.edu
  6. [6]TM 1000 Tabletop — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Was this page accurate?

Last updated Oct 10, 2026.

Compare with similar tools

View all →