Hitachi
S 9380 CD-SEM
What it is
The Hitachi S 9380 is a critical dimension scanning electron microscope (CD-SEM) used for metrology and inspection in semiconductor manufacturing.[1][4]
How it works
General reference — not yet source-verifiedSecondary electrons emitted from the sample are detected to form an image, and the system measures critical dimensions from that image.
Where it fits in the process flow
General reference — not yet source-verifiedThe measurements support process control and are used as feedback for lithography and etch tools in the fab.
The system is used as a non-destructive inspection step, allowing wafers to continue to subsequent processes after measurement.
Applications
General reference — not yet source-verifiedThe system is also used for defect review and general top-down imaging of sub-micron features.
What do the numbers mean?
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What kind of tool is a CD-SEM?General reference — not yet source-verified
It is an electron-beam metrology and inspection tool that images and measures very small patterned features on a surface.
What does this class measure?General reference — not yet source-verified
It is used to evaluate the size, shape, and consistency of fine structures, especially features formed by lithography and subsequent pattern transfer.
Why use electron-beam inspection instead of optical inspection?General reference — not yet source-verified
This class is used when feature sizes or edge detail are too small for practical optical measurement and when higher spatial resolution is needed.
Where is this tool used in fabrication?General reference — not yet source-verified
It is used in the metrology and inspection flow to check pattern quality after manufacturing steps and to support process control.
What kind of output does it provide?General reference — not yet source-verified
It provides high-resolution images and measurement data that can be used to assess feature dimensions, shape variation, and local defects.
Not publicly documented
The following facts about the S 9380 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9380 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9380 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9380 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9380 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9380 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]inventory listing
Last updated Oct 7, 2026.
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