Hitachi
S 9220
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Hitachi S 9220 is a metrology and inspection tool in the scanning electron microscope class. The Hitachi S 9220 CD-SEM is a critical dimension scanning electron microscope used for length measurement of semiconductor features.[3][4]
How it works
The Hitachi S 9220 CD-SEM uses an electromagnetic lens system with a booster stock lens. The Hitachi S 9220 CD-SEM uses a scintillator and photomultiplier detector with an EXB filter for two stage detection of secondary and backscattered electrons.[4]
The Hitachi S 9220 CD-SEM uses automatic wafer transfer by robot, vacuum suction chucking on the back side of the wafer, and automatic OF/V-notch detection by optical sensor. The stage uses pulse motor drive with linear encoder positioning and X and Y travel of 200 mm.[4]
What do the numbers mean?
Power & electrical5
- Single Phase[1]
Wafer handling1
Control & software2
- HDD and Software included[1]
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the Hitachi S 9220 used for?
The Hitachi S 9220 CD-SEM is used for length measurement of semiconductor features.[4]
What is the measuring range?
The measuring range is 0.1 μm to 2.0 μm.[4]
What is the throughput?
The throughput is 56 wafers per hour in continuous measurement mode.[4]
What acceleration voltage range does the electron optics provide?
The acceleration voltage is variable from 500 V to 1600 V in 10 V steps.[4]
What image resolution is specified?
The secondary electron image resolution is 3 nm at an acceleration voltage of 0.8 kV.[4]
Not publicly documented
The following facts about the S 9220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 9220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the S 9220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the S 9220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the S 9220 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the S 9220 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (4)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
- [4]S 9220 CD-SEM — Hitachi | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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