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Hitachi

S 8820 CD-SEM

Metrology & InspectionHitachi S 8820 CD-SEM family
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The Hitachi S 8820 CD-SEM is a critical dimension scanning electron microscope used for semiconductor metrology. The Hitachi S 8820 supports wafer sizes of 6 inch and 8 inch.[1][2][3][4][5]

S 8820 CD-SEM — Inventory photo
Fig. 01S 8820 CD-SEMInventory photo[4]

Power

5 nm (800V)[11]

Vacuum

Without dry pump[11]

Performance

3 sigma 1% or 5 nano[11]

Optics

3 stage lens systems (retarding method)[11]

What it is

General reference — not yet source-verified

A critical dimension scanning electron microscope (CD-SEM) is a type of scanning electron microscope used in semiconductor manufacturing to measure the dimensions of patterns on a wafer with nanometer-scale precision.

How it works

General reference — not yet source-verified

A CD-SEM operates by scanning a focused electron beam across the wafer surface and detecting secondary electrons emitted from the material. The intensity of the secondary electron signal varies with the topography and composition of the surface, creating an image from which critical dimensions such as linewidths and contact-hole diameters can be extracted by automated edge-detection algorithms.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Missing parts: HV Controller, Monitor

What do the numbers mean?

Power & electrical2

Image Resolution
5 nm (800V)[11]
Accurate?
Accelerating Voltage
500V to 1300V (10V step)[11]
Accurate?

Vacuum & pumping2

Vacuum system
3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[11]
Accurate?
Without dry pump[11]
Accurate?

Wafer handling8

Cassette index 6" 2 port[11]
Accurate?
Robot & Pri-Aligner
MECS UTC 100, OF 250[11]
Accurate?
Throughput
25 wafer/hour, 5point[11]
Accurate?
Wafer sizes supported
6 inch and 8 inch[3]
Accurate?
Wafer size
6 inch[2]
Accurate?
Wafer size
6, 8 inch[3]
Accurate?
Wafer sizes
6 inch; 8 inch[2]
Accurate?
Wafer sizes
6 inch[2]
Accurate?

Optics & imaging2

Electron Optic System
3 stage lens systems (retarding method)[11]
Accurate?
Magnification
OM mode : x 100, SEM mode : x 300 ~ 200,000[11]
Accurate?

Performance1

Measure Repeatability
3 sigma 1% or 5 nano[11]
Accurate?

Control & software6

Missing Parts
HV Controller, Monitor[4]
Accurate?
TMP 1 (+ Control)[12]
Accurate?
TMP 2 (+ Control)[12]
Accurate?
Aligner (+ Control)[12]
Accurate?
EVAC Controller[12]
Accurate?
Stage Controller[13]
Accurate?

Dimensions & facilities4

Tool type
CD-SEM (Critical Dimension Scanning Electron Microscope)[1]
Accurate?
Type
CD-SEM (Critical Dimension Scanning Electron Microscope)[1]
Accurate?
Category
Critical Dimension Scanning Electron Microscope[1]
Accurate?
Equipment type
Critical Dimension Scanning Electron Microscope[1]
Accurate?

Configuration & options15

Flat edge type[11]
Accurate?
Gun Tip Type
Denka 174DH[11]
Accurate?
CD Measurement Range
0.1 ~ 10 micro[11]
Accurate?
OS version
HP-UNIX 9.05[11]
Accurate?
SEM Version
Ver 9.25[11]
Accurate?
EWS
HP 715-33 with 4:3 LCD type monitor[11]
Accurate?
Stage system
X-Y 200mm Full range automatic motor driving[11]
Accurate?
Fully refurbished[11]
Accurate?
Missing Parts:[12]
Accurate?
OEM
Hitachi[1]
Accurate?
Model
S 8820[1]
Accurate?
Model
S 8820 CD-SEM[1]
Accurate?
Vintage year
1995[1]
Accurate?
Vintage
1995[1]
Accurate?
Vintage
1997[4]
Accurate?
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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Image Resolution5 nm (800V)[11]
  • Accelerating Voltage500V to 1300V (10V step)[11]
  • Vacuum system3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[11]
  • ConfigurationWithout dry pump[11]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What type of equipment is the Hitachi S 8820?

The Hitachi S 8820 is a critical dimension scanning electron microscope (CD-SEM) used for semiconductor metrology.[1][2][3][4][5]

Not publicly documented

The following facts about the S 8820 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the S 8820 CD-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the S 8820 CD-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the S 8820 CD-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the S 8820 CD-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the S 8820 CD-SEM are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (15)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Inventory photo
  5. [5]Inventory photo
  6. [6]Inventory photo
  7. [7]Inventory photo
  8. [8]Inventory photo
  9. [9]Inventory photo
  10. [10]Inventory photo
  11. [11]inventory listing
  12. [12]inventory listing
  13. [13]inventory listing
  14. [14]Equipment inventory listing
  15. [15]Equipment inventory listing
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Last updated Oct 10, 2026.

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