Hitachi
Kokusai DD 823 V Vertical Diffusion
The Hitachi Kokusai DD 823 V is a vertical diffusion furnace for 8-inch wafers. The DD 823 V is used for processes such as H2 anneal.[1][2]
What is it?
Applications
What do the numbers mean?
Power & electrical2
Wafer handling17
- N2 Load Lock Not Installed[2]
Gas & chemistry8
Optics & imaging1
Control & software10
Configuration & options21
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Tokyo Electron Alpha 8 SE D— Same function class: Thermal / Diffusion, nullCompare in depthsource[3]
- Tokyo Electron Telindy Plus I Rad Vertical— Same function class: Thermal / Diffusion, nullCompare in depthsource[4]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Gas ControllerCX 3201 B[1]
- Gas DetectorRiken Keiki GD-V 11 D[1]
- Detecting GasH2[1]
- Process GasN2, H2[1]
- Basic Style (Gas System)Integrated Gas System (Fujikin)[1]
- Gas ControllerCX 2003 A[2]
- Gas detectorRiken Keiki GD-V 11 D (H2)[1]
- Gas detector (alternative)Riken Keiki GD-D 8 V (H2)[2]
- Gas system basic styleIntegrated Gas System (Fujikin)[1]
- ModelDD 823 V[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Kokusai DD 823 V Vertical Diffusion are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Kokusai DD 823 V Vertical Diffusion are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Kokusai DD 823 V Vertical Diffusion are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Kokusai DD 823 V Vertical Diffusion is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Equipment inventory listing
- [4]Equipment inventory listing
- [5]Equipment inventory listing
- [6]Equipment inventory listing
Last updated Oct 3, 2026.
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