Hitachi
CS 4800 CD-SEM
The Hitachi CS 4800 is a critical dimension scanning electron microscope (CD-SEM). The Hitachi CS 4800 supports wafer sizes of 3, 4, and 8 inches. The Hitachi CS 4800 includes a dual cassette wafer handler.[1]
What it is
General reference — not yet source-verifiedCD-SEMs are a class of scanning electron microscopes specifically designed to measure critical dimensions of patterns on semiconductor wafers with high precision and repeatability.
How it works
General reference — not yet source-verifiedThe measurement process typically involves acquiring high-magnification images of specific features, such as line widths or contact hole diameters, and then applying edge-detection algorithms to determine the dimensions. CD-SEMs provide automated measurement recipes for high-throughput in-line monitoring.
Where it fits in the process flow
General reference — not yet source-verifiedCD-SEM measurements feed into process control feedback loops, allowing adjustments to lithography exposure and etch times to maintain critical dimension uniformity across the wafer and from lot to lot. The data may also be used for development of new process nodes.
What do the numbers mean?
Power & electrical5
- Power Supply Cabinet[1]
Vacuum & pumping2
- Edwards iXL120E Vacuum Pump[1]
Wafer handling3
- Dual cassette[1]
Control & software2
- Dell Latitude Control Laptop[1]
Configuration & options4
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the CS 4800 CD-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CS 4800 CD-SEM are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the CS 4800 CD-SEM are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the CS 4800 CD-SEM are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CS 4800 CD-SEM are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CS 4800 CD-SEM is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Hitachi | Service for Hitachi CS 4800 CD-SEM systems — classoneequipment.comclassoneequipment.com
Last updated Oct 11, 2026.
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