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Hitachi

4800

Metrology & InspectionHitachi 4800 family
Research Quality: 20% complete

The Hitachi 4800 is a scanning electron microscope. The Hitachi 4800 uses an in-lens SE detector and an Everhart-Thornley SE detector. The Hitachi 4800 uses a magnetic semi-immersion TFE source.[1]

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  • Plate 01Hitachi S-4800 Demonstration

    CSK InternationalWatch on YouTube

What is it?

The Hitachi 4800 is identified as a modern high-resolution FE SEM. The Hitachi 4800 uses an in-lens SE detector and an Everhart-Thornley SE detector. The Hitachi 4800 is described with a magnetic semi-immersion objective lens design and a TFE source.

What do the numbers mean?

Optics & imaging4

Instrument type
Modern high resolution FE SEM[1]
Accurate?
Detector
In Lens SE[1]
Accurate?
Detector
E-T SE[1]
Accurate?
Objective lens
Magnetic semi immersion[1]
Accurate?

Configuration & options1

Source
TFE[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What does the SEM image signal come from?

The SEM forms images from emitted electrons, especially secondary electrons, collected from the sample after the primary beam interacts with the surface.[1]

What are the main parts of a scanning electron microscope?

A modern SEM includes an electron source, focusing and deflection optics, a specimen stage, a detection system, and an image acquisition and control system.[1]

Which detector is used for surface topography?

The secondary-electron detector is strongly dependent on sample orientation and topography and is used for surface detail imaging.[1]

Which detector is used for compositional contrast?

The backscattered-electron signal increases with atomic number, so backscattered-electron imaging is used for compositional or Z contrast.[1]

What part of the column affects resolution and depth of field?

The objective aperture affects probe current, convergence angle, resolution, and depth of field.[1]

Not publicly documented

The following facts about the 4800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4800 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4800 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4800 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4800 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4800 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]cnfusers.cornell.edu — cnfusers.cornell.educnfusers.cornell.edu
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Last updated Oct 9, 2026.

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