Filmetrics
F10-RT-UVX
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
Filmetrics F10-RT-UVX is a tool for measuring reflection/transmission spectra and optical film thickness.[1]
What it is
The Filmetrics F10-RT-UVX is an optical thin-film metrology instrument. The F10-RT-UVX is used to measure reflection spectra, transmission spectra, and optical film thickness. The instrument belongs to a class of tools that characterize thin films by analyzing the interference pattern of light reflected from or transmitted through the film stack.[2]
Where it fits in the process flow
General reference — not yet source-verifiedThin-film metrology tools are used after deposition steps to verify film thickness and optical properties. The measurements are typically performed on monitor wafers or on product wafers at designated measurement sites. Feedback from the metrology tool is used to adjust deposition process parameters to maintain target thickness and uniformity.
What can it run?
Process applications and technology nodes documented for this tool.
- Reflection/transmission spectra measurement
- Optical film thickness measurement
What do the numbers mean?
Optics & imaging1
Configuration & options2
What replaced it?
Related models
- siblingFilmetrics F50— Listed as another Filmetrics optical film thickness tool in the UCSB tool list.source[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What does the Filmetrics F10-RT-UVX measure?
The F10-RT-UVX measures reflection spectra, transmission spectra, and optical film thickness.[2]
Not publicly documented
The following facts about the F10-RT-UVX are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the F10-RT-UVX are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the F10-RT-UVX are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the F10-RT-UVX are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the F10-RT-UVX are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the F10-RT-UVX is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]wiki.nanotech.ucsb.edu — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
- [2]Tool List - UCSB Nanofab Wiki — wiki.nanofab.ucsb.eduwiki.nanofab.ucsb.edu
- [3]Tool List - UCSB Nanofab Wiki — wiki.nanotech.ucsb.eduwiki.nanotech.ucsb.edu
Last updated Oct 3, 2026.
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