Waferpedia

CHA

SE600

Lithography300mmCHA SE600 family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

CHASE600
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  • Plate 01My Design BROTHER SE600 Embroidery machine #shorts

    GraceyWatch on YouTube
  • Plate 02CHA SE-600-RAP E-Beam Evaporator

    Bid ServicellcWatch on YouTube
  • Plate 03Brother SE600: How to setup for sewing (Thread your machine and wind a bobbin!) - SE625/SE630

    JK StudioWatch on YouTube
  • Plate 04CHA SE-600-RAP Evaporator #58417

    Bid ServicellcWatch on YouTube
  • Plate 05Brother SE600 Computerized Sewing and Embroidery Machine with 4" x 4" Embroidery Area

    Brother Sews USAWatch on YouTube
  • Plate 06How to set up the Se 600 to Sew

    The Impossible Co.Watch on YouTube
  • Plate 07CHA SE-600-RAP Evaporator

    Bid ServicellcWatch on YouTube
  • Plate 08How to thread the Brother SE600 Sewing:embroidery machine for embroidering

    A-Dubb Productions Allan WadeWatch on YouTube
  • Plate 09EMBROIDER right OUT THE BOX Brother SE600 - STEP BY STEP DETAILED

    dane meddingsWatch on YouTube

Wafer size

300mm

Optics

Electron Beam Lithography System[1]

What it is

The CHA SE600 is an electron beam evaporator used for thin-film deposition.[2]

How it works

General reference — not yet source-verified

The evaporated material travels through vacuum and deposits as a thin film on the target surface.

Electron beam evaporation is used when a process needs controlled deposition of metals or other condensable films with line-of-sight transport.

Where it fits in the process flow

General reference — not yet source-verified

The CHA SE600 belongs in the thin-film deposition section of a semiconductor or microfabrication flow.

The CHA SE600 is used after substrate preparation and before later pattern-transfer or integration steps that rely on the deposited film.

Applications

The CHA SE600 is used for gold deposition.[3]

  • Direct-write applications

What do the numbers mean?

Wafer handling1

Substrate range
10 mm pieces up to 300 mm wafers[1]
Accurate?

Optics & imaging3

Tool type
Electron Beam Lithography System[1]
Accurate?
Minimum feature size
less than 10 nm[1]
Accurate?
Equipment type
Electron beam evaporator[2]
Accurate?

Configuration & options4

Alternate description
Gold evaporator[3]
Accurate?
Manufacturer
CHA[2]
Accurate?
Part number
SE600[3]
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Unit vintage date
01.06.1980[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What type of light source does a typical mature-node lithography system use?General reference — not yet source-verified

Most systems in this class use a mercury arc lamp providing g-line or i-line ultraviolet radiation, with wavelength selection filters. Some advanced mature-node systems may employ a KrF excimer laser for the deep ultraviolet region.

What determines the minimum achievable feature size in such a system?General reference — not yet source-verified

Resolution is primarily governed by the exposure wavelength and the numerical aperture of the projection lens, as described by the Rayleigh criterion. Systems designed for larger features use longer wavelengths and can achieve adequate resolution with conventional optical components, while maintaining a larger depth of focus.

How does the alignment system work on these tools?General reference — not yet source-verified

Alignment is carried out using optical detection of fiducial marks on the wafer and the mask. Off-axis or through-the-lens microscopes capture the relative positions, and a control system adjusts the stage or mask to minimize overlay error. Typical specifications are expressed as a fraction of the minimum feature size.

What maintenance is typically needed for these machines?General reference — not yet source-verified

Routine maintenance includes periodic lamp replacement, cleaning of optical surfaces, calibration of alignment systems, and checking of stage motion accuracy. Optical component degradation over time can affect uniformity and resolution, so regular performance monitoring is recommended.

Not publicly documented

The following facts about the SE600 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SE600 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the SE600 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the SE600 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the SE600 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the SE600 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]cnf.cornell.edu — cnf.cornell.educnf.cornell.edu
  2. [2]fabsurplus.com — fabsurplus.comfabsurplus.com
  3. [3]semi-sps.com — semi-sps.comsemi-sps.com
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Last updated Oct 4, 2026.

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