Comparison ledger
Brooks 017-0146-01 Prealigner, CHA SE600, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | SE600CHA |
|---|---|---|
| OEM | Brooks | CHA |
| Category | Lithography | Lithography |
| Wafer size | — | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | CHA SE600 |
| Specifications | ||
| Tool type | — | Electron Beam Lithography System[1] |
| Substrate range | — | 10 mm pieces up to 300 mm wafers[1] |
| Minimum feature size | — | less than 10 nm[1] |
| Equipment type | — | Electron beam evaporator[2] |
| Alternate description | — | Gold evaporator[3] |
| Manufacturer | — | CHA[2] |
| Part number | — | SE600[3] |
| Unit vintage date | — | 01.06.1980[2] |
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