Bruker
Dektak 150 Surface
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
The Bruker Dektak 150 Surface is a surface profiler used in metrology and inspection.[5]
The Dektak 150 is a contact stylus profilometer for measuring surface profile and step height.[2][4]
How it works
Where it fits in the process flow
The Dektak 150 is used on samples up to six inches in dimension and up to four inches thick.[2]
Applications
What do the numbers mean?
Wafer handling1
Optics & imaging2
Dimensions & facilities2
Configuration & options13
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What type of measurement does the Dektak 150 perform?
The Dektak 150 performs thin and thick film step-height measurement.[2]
What sample size can the Dektak 150 handle?
The Dektak 150 can measure samples up to six inches in dimension and up to four inches thick.[2]
What is the maximum substrate size mentioned for the Dektak 150?
The maximum substrate size is 6 inch.[2]
What vertical performance figure is given for the Dektak 150?
The system provides a step-height repeatability of 0.6 nm.[2]
Not publicly documented
The following facts about the Dektak 150 Surface are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Dektak 150 Surface are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Dektak 150 Surface are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Dektak 150 Surface are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Dektak 150 Surface are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Dektak 150 Surface is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]nnci.net — nnci.netnnci.net
- [3]nuance.northwestern.edunuance.northwestern.edu
- [4]directadvop.com — directadvop.comdirectadvop.com
- [5]Dektak 150 Surface — Bruker | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 8, 2026.
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