Waferpedia

Applied Materials

Complus MP Patterned Wafer

Metrology & Inspection
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Applied Materials Complus MP Patterned Wafer is a metrology and inspection tool. Applied Materials Complus MP Patterned Wafer is a patterned wafer inspection system. Applied Materials ComPlus - 3T material references a 200 mm factory interface.[1][2][3]

Applied Materials logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Applied Materials Complus MP Patterned Wafer is a metrology and inspection tool.[2][1]

How it works

General reference — not yet source-verified

A patterned wafer inspection system examines fabricated wafer surfaces for defects and process-related irregularities on structures that have already been patterned.

A metrology and inspection tool in this class typically supports in-line quality control by measuring or imaging wafer features and flagging nonconforming areas for review.

Applications

The Complus MP Patterned Wafer is used for patterned wafer inspection within semiconductor metrology and inspection.[2][1]

What do the numbers mean?

Wafer handling3

Description
Patterned wafer inspection system[3]
Accurate?
Factory interface
200 mm OPEN Cassette Adaptor[3]
Accurate?
Tool type
Patterned wafer inspection system[1]
Accurate?

Configuration & options4

Manufacturer
Applied Materials[1]
Accurate?
Model
Complus MP[2]
Accurate?
Category
Metrology & Inspection[1]
Accurate?
System options
SECS/GEM + HSMS[3]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
ComPlus - 3T—2006Upgraded to Complus 3T.fabsurplus.com[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the model name of this inspection system?

The model is the Applied Materials Complus MP.[2][1][3]

What type of equipment is the Complus MP?

The Complus MP is a patterned wafer inspection system, classified under metrology and inspection.[2][1]

What wafer size does the Complus MP support?

The system supports 200 mm wafers via a factory interface that includes an open cassette adaptor.[1][3]

What communication protocols does the Complus MP support?

The system supports SECS/GEM and HSMS communication protocols.[1][3]

Not publicly documented

The following facts about the Complus MP Patterned Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Complus MP Patterned Wafer are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the Complus MP Patterned Wafer are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Complus MP Patterned Wafer are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Complus MP Patterned Wafer is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Complus MP Patterned Wafer are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]waferpedia.com — waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]fabsurplus.com — fabsurplus.comfabsurplus.com
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Last updated Oct 9, 2026.

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