Waferpedia

Applied Materials

Centura TPCC RTP

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Applied Materials Centura TPCC RTP System is a rapid thermal process system. Applied Materials Centura TPCC RTP System has an 8 inch wafer size.[1]

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What it is

The Applied Materials Centura TPCC is a rapid thermal processing (RTP) system. The system is configured for 8 inch wafers.[1]

Applications

General reference — not yet source-verified

Applications for the Centura TPCC include annealing processes that repair damage from ion implantation and activate dopants. The tool can also be used for thermal oxidation to grow thin gate or capacitor dielectrics. Nitridation processes can be run to form or modify nitride layers, and silicide or other contact anneals can be performed. RTP applications generally demand fast temperature ramps and uniform temperature profiles across the wafer.

What do the numbers mean?

Wafer handling1

Wafer size
8 inch[1]
Accurate?

Configuration & options3

OEM
Applied Materials[1]
Accurate?
Model
Centura TPCC[1]
Accurate?
System type
Rapid Thermal Process (RTP) system[1]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the Applied Materials Centura TPCC?

The Applied Materials Centura TPCC is a rapid thermal processing (RTP) system.[1]

What wafer size is the Centura TPCC configured for?

The Centura TPCC is configured for 8 inch wafers.[1]

Is the Centura TPCC an RTP system?

Yes, the Centura TPCC is an RTP system, with RTP standing for Rapid Thermal Process.[1]

Not publicly documented

The following facts about the Centura TPCC RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura TPCC RTP are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Centura TPCC RTP are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Centura TPCC RTP are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Centura TPCC RTP are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Centura TPCC RTP is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
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Last updated Oct 1, 2026.

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