Agilent

E 5260 A Measurement Mainframe

Agilent E 5260 A Measurement Mainframe family

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AgilentE 5260 A Measurement Mainframe

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What it is

The Agilent E 5260 A Measurement Mainframe is a measurement mainframe for current-voltage characterization.^[2]

The E 5260 A is an eight-slot mainframe for plug-in measurement modules.^[2]

How it works

The E 5260 A supports multiple source and monitor units for voltage and current sourcing and voltage and current measurement. The E 5260 A includes an active ground unit in the mainframe to force ground potential and sink current.^[2]

The E 5260 A uses GUI-based characterization software for measurement setup, execution, analysis, and data management.^[2]

Where it fits in the process flow

The E 5260 A can support characterization across a wafer in conjunction with a semiautomatic wafer prober. The E 5260 A can also serve as a system component in a rack and stack test system.^[2]

Applications

The E 5260 A is used for characterization and evaluation of devices, materials, semiconductors, active components, passive components, and other electronic devices.^[2]

The E 5260 A supports current-voltage measurement with spot and sweep modes.^[2]

What do the numbers mean?

Power & electrical5

Function: Current-voltage characterization^[2]
Measurement function: Current-voltage characterization^[2]
Output voltage range: 0 V to ± 200 V^[2]
Power requirement: AC voltage 90 V to 264 V; line frequency 47 Hz to 63 Hz; maximum 600 VA^[2]
Power requirement: AC 90 V to 264 V, 47 Hz to 63 Hz^[2]

Dimensions & facilities3

Dimensions: 426 mm W x 235 mm H x 575 mm D^[2]
Weight: 17 kg mainframe only^[2]
Weight, mainframe only: 17 kg^[2]

Configuration & options16

Model: E 5260 A^[1]
Manufacturer: Agilent^[1]
Product name: Measurement Mainframe^[1]
Alternate designation: E5260A IV Analyzer/8 Slot High Speed Measurement Mainframe^[2]
Slots: 8 plug-in module slots^[2]
Supported modules: SMU modules^[2]
Model designation: E5260A IV Analyzer/8 Slot High Speed Measurement Mainframe^[2]
Plug-in module slots: Up to 8 slots^[2]
Measurement modes: Spot measurement, staircase sweep measurement, multi-channel sweep measurement, pulsed spot measurement, pulsed sweep measurement, staircase sweep with pulsed bias measurement, quasi-pulsed spot measurement, linear search measurement, binary search measurement^[2]
Current measurement performance: As low as 5 pA^[2]
Output current range: ± 100 pA to ± 1 A^[2]
General purpose digital I/O: 16 signals via a 25-pin DIN connector^[2]
Plug-in module slots: 8 slots^[2]
Supported module types: Medium Power SMU (MPSMU) and High Power SMU (HPSMU)^[2]
Operating temperature range: +5°C to +40°C^[2]
Maximum VA: 600 VA^[2]

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FunctionCurrent-voltage characterization^[2]
Measurement functionCurrent-voltage characterization^[2]
Output voltage range0 V to ± 200 V^[2]
Power requirementAC voltage 90 V to 264 V; line frequency 47 Hz to 63 Hz; maximum 600 VA^[2]
Power requirementAC 90 V to 264 V, 47 Hz to 63 Hz^[2]

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Frequently asked questions

How many plug-in module slots does the E 5260 A provide?

The E 5260 A provides eight slots for plug-in modules.^[2]

What kinds of SMU modules does the E 5260 A support?

The E 5260 A supports the E5290A high-speed HPSMU and the E5291A high-speed MPSMU.^[2]

What current and voltage ranges are specified for the mainframe module set?

The E5290A is specified for negative two hundred volts to positive two hundred volts and negative one ampere to positive one ampere. The E5291A is specified for negative one hundred volts to positive one hundred volts and negative two hundred milliamperes to positive two hundred milliamperes.^[2]

What measurement capability is highlighted for the E 5260 A?

The E 5260 A is specified for current measurement performance as low as five picoamperes.^[2]

Can the E 5260 A support remote control?

The E 5260 A can be controlled remotely by the FLEX command set and supports remote execution of application tests via the LAN interface.^[2]

Not publicly documented

The following facts about the E 5260 A Measurement Mainframe are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the E 5260 A Measurement Mainframe are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the E 5260 A Measurement Mainframe are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the E 5260 A Measurement Mainframe are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the E 5260 A Measurement Mainframe are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the E 5260 A Measurement Mainframe is not on record.
Answerable by: an OEM datasheet or a fab qualification report