Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Agilent E 5260 A Measurement Mainframe, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | ABM | Agilent |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Agilent E 5260 A Measurement Mainframe |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[1] | E 5260 A[2] |
| Description | ROBOT[1] | — |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[1] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[1] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[1] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[1] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[1] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[1] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[1] | — |
| Manufacturer | — | Agilent[2] |
| Product name | — | Measurement Mainframe[2] |
| Alternate designation | — | E5260A IV Analyzer/8 Slot High Speed Measurement Mainframe[3] |
| Slots | — | 8 plug-in module slots[3] |
| Function | — | Current-voltage characterization[3] |
| Supported modules | — | SMU modules[3] |
| Model designation | — | E5260A IV Analyzer/8 Slot High Speed Measurement Mainframe[3] |
| Plug-in module slots | — | Up to 8 slots[3] |
| Measurement function | — | Current-voltage characterization[3] |
| Measurement modes | — | Spot measurement, staircase sweep measurement, multi-channel sweep measurement, pulsed spot measurement, pulsed sweep measurement, staircase sweep with pulsed bias measurement, quasi-pulsed spot measurement, linear search measurement, binary search measurement[3] |
| Current measurement performance | — | As low as 5 pA[3] |
| Output voltage range | — | 0 V to ± 200 V[3] |
| Output current range | — | ± 100 pA to ± 1 A[3] |
| General purpose digital I/O | — | 16 signals via a 25-pin DIN connector[3] |
| Dimensions | — | 426 mm W x 235 mm H x 575 mm D[3] |
| Weight | — | 17 kg mainframe only[3] |
| Power requirement | — | AC voltage 90 V to 264 V; line frequency 47 Hz to 63 Hz; maximum 600 VA[3] |
| Supported module types | — | Medium Power SMU (MPSMU) and High Power SMU (HPSMU)[3] |
| Operating temperature range | — | +5°C to +40°C[3] |
| Weight, mainframe only | — | 17 kg[3] |
| Maximum VA | — | 600 VA[3] |