Tool family
The Zeiss Axiotron 300 is an automated optical inspection microscope for wafer inspection and review, supporting 200 mm and 300 mm wafer sizes with brightfield, darkfield, and DIC observation.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Axiotron 300 AOI | — | — | — | waferpedia.com[1] |