Waferpedia

Tool family

Veeco LSA101

The Veeco LSA101 is a Laser Spike Annealing System used for precision doping of materials at a controlled temperature in semiconductor manufacturing.

Models in this family

  1. LSA101introduced 2021

    The Veeco LSA101 is a Laser Spike Annealing System used for precision doping of materials at a controlled temperature in semiconductor manufacturing.