Lam Research Alliance

Models in this family

1. 

   Alliance 4400

   The Lam Research Alliance 4400 is a semiconductor equipment system consisting of a two-chamber set and a controller.

2. Alliance 6 4720 XL

   The Lam Alliance 6 4720 XL is an etch tool for 8-inch wafers.

3. Alliance 6 9400 DSIE

   The Lam Research Alliance 6 9400 DSIE is a three-chamber semiconductor equipment system for 8-inch wafers.

4. 

   Alliance 6 9400 PTX

   The Lam Research Alliance 6 9400 PTX is an etcher for 8-inch wafers.

5. Alliance 9100 PTX Dry

   The Lam Research Alliance 9100 PTX is a dry etcher that processes 8-inch wafers.

6. 

   Alliance 9400 DSiE

   The Lam Alliance 9400 DSiE is an etcher described with 6-inch wafer size and 3 chambers.

7. 

   Alliance A 6

   Lam Research Alliance A 6 is a semiconductor manufacturing tool family that appears in configurations with a MAG 7 robot, an enhanced gas box with 12 gas lines, and multiple chamber options.

8. 

   Alliance A 6 9400 DSIE III Process

   The Lam Alliance A 6 9400 DSIE III is an 8-inch process chamber.

9. Alliance A 6 Exelan HP Dielectric

   Lam Alliance A 6 Exelan HP Dielectric is an etch tool with an 8-inch wafer size.

10. Alliance A 6 Multi-Process

    The Lam Alliance A 6 Multi-Process Etch is a multi-process etch system designed for 6-inch wafers.