Waferpedia

Tool family

JEOL JBX-8100FS

JEOL1 entry

JEOL JBX-8100FS is identified as a maskless lithograph ML2 type based on a patented ZrO/W (Schottky) emitter.

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Models in this family

  1. JBX-8100FS

    The JEOL JBX-8100FS is a spot-beam electron beam lithography system designed for high-throughput direct-write patterning on wafers up to 200mm.

    Cited variants

    DesignationGenerationVintageChangesSource
    G1——Entry model; optional accessories can be added as needed.jeol.com[1]
    G2——Full option model.jeol.com[1]
    G3——200 kV model.jeol.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]jeol.comjeol.com