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Tool family

Axcelis M 150 PC UV

AxcelisThermal / Diffusion1 entry

Axcelis M 150 PC UV Cure System.

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Models in this family

  1. M 150 PC UV

    The Axcelis M 150 PC UV is a thermal/diffusion system used in semiconductor manufacturing for high-temperature annealing, oxidation, and dopant diffusion processes.