Comparison ledger
KLA .496 PSL Wafer, KLA 7600 Patterned Wafer Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 25 Wafer Slot Cassette |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA 7600 Patterned Wafer Particle Defect |
| Specifications | ||
| Configuration | NIST Traceable[1] | Cassette Transfer[4] |
| Wafer size | 8 inch[1] | 25 Wafer Slot Cassette[3] |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | Metrology & Inspection[3] |
| Process Vac | — | 23 InHg[4] |
| Inlet Power | — | 1 line of 208 Vac 15 Amp[3] |
| Manufacturer | — | KLA[3] |
| Cassette transfer | — | Included[3] |
| Scan stage | — | Included[3] |
| Wafer transfer | — | Included[3] |
| Boat elevator / robot transfer | — | Included[3] |
| Exhaust | — | Exhaust with Blower for laser cooling[3] |
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