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200 PCU Photoresist StabilizerversusAct 8

Axcelis 200 PCU Photoresist Stabilizer, Tokyo Electron Act 8, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCU Photoresist StabilizerAxcelis
Act 8Tokyo Electron
OEMAxcelisTokyo Electron
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200Tokyo Electron Act
Cited variants—
  • Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates[1]
  • Act 8 Coater / Developer, 8" - Single[2]
  • Act 8 Coater / Developer, 8"[3]
  • Tel Act 8 Coater / Developer, 8" - Single[2]
  • Tel Act 8 Coater / Developer - Dual Block, 4 Load Port/1 Side Port - 4 Coaters - 3 Developers - 1 TCT - 14 PHP Hot Plates[1]
  • Tel Act 8 Coater / Developer, 8"[3]
Specifications
Configuration14 Amps[4]Dual Block, 4 Load Port/1 Side Port[1]
Voltage380 V[4]—
Frequency50 Hz[4]—
Phase3 Phase[4]—
Vintage—2006
Coaters & Developers Vintage—1999
Wafer Size—8 inch[8]
200 PCU Photoresist Stabilizer entryAct 8 entryAsk about these tools →Share experience with this comparison →

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Sources (8)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]Equipment inventory listing