Comparison ledger
Applied Materials SEMVision G 2 CD-SEM, Hitachi S 8820 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SEMVision G 2 CD-SEMApplied Materials | S 8820 CD-SEMHitachi |
|---|---|---|
| OEM | Applied Materials | Hitachi |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials SEMVision | Hitachi S 8820 CD-SEM |
| Specifications | ||
| Configuration | With EDX (Energy Dispersive X-ray Spectroscopy)[1] | Flat edge type[4] |
| Largest Load | 8 A[1] | — |
| Full Load Current | 10 A[1] | — |
| Manufacturer | Applied Materials[1] | — |
| Model | SEMVision G 2[1] | S 8820[8] |
| Tool type | CD-SEM (Critical Dimension Scanning Electron Microscope)[1] | CD-SEM (Critical Dimension Scanning Electron Microscope)[8] |
| Category | Metrology & Inspection[2] | Critical Dimension Scanning Electron Microscope[8] |
| Wafer size | 12 inch[1] | 6 inch[9] |
| EDX | Included[1] | — |
| HDD and software | Included[1] | — |
| Missing Parts | — | HV Controller, Monitor[3] |
| Robot & Pri-Aligner | — | MECS UTC 100, OF 250[4] |
| Gun Tip Type | — | Denka 174DH[4] |
| Image Resolution | — | 5 nm (800V)[4] |
| Accelerating Voltage | — | 500V to 1300V (10V step)[4] |
| Electron Optic System | — | 3 stage lens systems (retarding method)[4] |
| Measure Repeatability | — | 3 sigma 1% or 5 nano[4] |
| CD Measurement Range | — | 0.1 ~ 10 micro[4] |
| Magnification | — | OM mode : x 100, SEM mode : x 300 ~ 200,000[4] |
| Throughput | — | 25 wafer/hour, 5point[4] |
| OS version | — | HP-UNIX 9.05[4] |
| SEM Version | — | Ver 9.25[4] |
| EWS | — | HP 715-33 with 4:3 LCD type monitor[4] |
| Vacuum system | — | 3 of ION pump, 2 set of Turbo pump, 2 set of Dry pump (option)[4] |
| Stage system | — | X-Y 200mm Full range automatic motor driving[4] |
| Wafer sizes supported | — | 6 inch and 8 inch[7] |
| OEM | — | Hitachi[8] |
| Type | — | CD-SEM (Critical Dimension Scanning Electron Microscope)[8] |
| Wafer sizes | — | 6 inch; 8 inch[9] |
| Vintage year | — | 1995[8] |
| Equipment type | — | Critical Dimension Scanning Electron Microscope[8] |
| Vintage | — | 1995[8] |
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