Comparison ledger
Applied Materials 0041-39086 ESC Part, Tegal 981ACS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0041-39086 ESC PartApplied Materials | 981ACSTegal |
|---|---|---|
| OEM | Applied Materials | Tegal |
| Category | Etch | Etch |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Tegal 981ACS |
| Specifications | ||
| Wafer size (diameter) | — | 150 mm, 200 mm[1] |
| Wafer size (square) | — | 100 mm square, 6-inch square[1] |
| Reactor type | — | Wide-gap diode (scaled-up version of 901ACS)[1] |
| Applications | — | Non-critical photoresist removal, photoresist trimming, large-scale etching, planarization, backside etching, BioChip nanotechnology[1] |
| Footprint | — | Small; no external rack-mount electronics[1] |
| User interface | — | Intuitive touchscreen interface[1] |
| Maintenance | — | Long-lasting, low maintenance parts[1] |
| Wafer handling | — | Cassette to cassette (no manual handling)[1] |
| Temperature control | — | All electrodes precisely temperature controlled[1] |
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