Comparison ledger
Applied Materials 0010-16392 ESC Assembly, Lam Research Rainbow 4528 I, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-16392 ESC AssemblyApplied Materials | Rainbow 4528 ILam Research |
|---|---|---|
| OEM | Applied Materials | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0010-16392 ESC Assembly | Lam Research Rainbow |
| Specifications | ||
| OEM | Applied Materials[1] | — |
| Model | 0010-16392[1] | — |
| Type | ESC Assembly[1] | Plasma etcher[3] |
| Wafer Size | 300 mm[2] | — |
| Electrode Configuration | Dual[2] | — |
| Software | — | Envision 1.5.2[3] |
| RF | — | Paramount 1213 / Paramount MF 3KW[3] |
| Configuration | — | RF Cart[3] |
| AC Box | — | 002 (breakers)[3] |
| Robot | — | Harmonic Drive[3] |
| Loader | — | Hine Indexers 38A[3] |
| Controllers | — | AC2G controller ISO THV / AC2 main chamber THV[3] |
| GAS 1 | — | Ar: 500 sccm[3] |
| GAS 2 | — | CF4: 200 sccm[3] |
| GAS 3 | — | CHF3: 100 sccm[3] |
| GAS 4 | — | SF6: 100 sccm[3] |
| GAS 5 | — | N2: 100 sccm[3] |
| GAS 6 | — | O2: 100 sccm[3] |
| GAS 7 | — | He: 1000 sccm[3] |
| GAS 8 | — | NF3: 1000 sccm[3] |
| GAS 10 | — | O2: 100 sccm[3] |
| Wafer size | — | 8 inch[3] |
| RF cart | — | RF Cart[3] |
| AC Rack | — | on mezzanine[3] |
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