Lam Research
Rainbow 4528 I
What it is
The Lam Research Rainbow 4528 I is configured to process 200-millimeter (8-inch) wafers. The system includes a Paramount 1213 / Paramount MF 3KW radio-frequency (RF) generator, an RF cart, and an ISO module. The wafer-handling subsystem uses a Harmonic Drive robot and Hine Indexers 38A loaders.[1][2]
How it works
The Rainbow 4528 I uses a Paramount 1213 / Paramount MF 3KW RF power source to generate the plasma. The system provides eight gas lines with programmable flow controllers: argon (500 sccm), CF4 (200 sccm), CHF3 (100 sccm), SF6 (100 sccm), N2 (100 sccm), O2 (100 sccm), helium (1000 sccm), and NF3 (1000 sccm). A second O2 line is also available at 100 sccm. The system runs Envision 1.5.2 software and uses AC2G and AC2 main chamber throttle valve (THV) controllers for chamber pressure regulation.[1][2]
What do the numbers mean?
Power & electrical3
- RF Cart[1]
Wafer handling3
Gas & chemistry9
Control & software2
Configuration & options5
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Rainbow 4528 I are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4528 I are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Rainbow 4528 I are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Rainbow 4528 I are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4528 I are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4528 I is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Rainbow 4528 I — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 11, 2026.
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