Comparison ledger
Applied Materials 0010-03254 E Chuck, Edwards IH 1800, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | IH 1800Edwards |
|---|---|---|
| OEM | Applied Materials | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Edwards IH 1800 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | Fully refurbished[2] |
| Pumping speed | — | 1,060 CFM[3] |
| Ultimate pressure | — | 7.5 x 10^-4 Torr[3] |
| Inlet | — | ISO160[3] |
| Exhaust | — | KF40[3] |
| Motor | — | 3 Phase, 208-230/460V, 50/60Hz[3] |
| Weight | — | 1,107 lbs[3] |
| Dry pump component | — | HCDP160[1] |
| Mechanical booster component | — | HMB1800[1] |
| Pumping chamber lubrication | — | None (dry, no lubricating or sealing fluid)[1] |
| Motor cooling | — | Enclosed, water-cooled[1] |
| Gas system | — | Purge gas introduced into HCDP pump, with economiser gas mode[1] |
| Type | — | Dry pump[3] |
| Pump composition | — | HCDP160 dry pump with HMB1800 mechanical booster pump[1] |