Edwards
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The Edwards iH-1800 is a dry vacuum pump system for semiconductor processes. The iH-1800 consists of an HCDP160 dry pump and an HMB1800 mechanical booster pump. The iH-1800 achieves a pumping speed of 1,060 CFM and an ultimate pressure of 7.5×10⁻⁴ Torr.[1][2]
The Edwards IH 1800 is a dry vacuum pump system for semiconductor manufacturing. The system consists of an HCDP160 dry pump and an HMB1800 mechanical booster pump fitted to the inlet of the HCDP160 pump. The IH 1800 operates without lubricating or sealing fluid in the pumping chamber, ensuring no back-migration of oil into the evacuated system. Both the HCDP and HMB pumps have enclosed, water-cooled motors, making the system suitable for clean environments where fan cooling is unacceptable.[2]
The Edwards IH 1800 system includes a gas system that introduces purge gas into the HCDP pump, suitable for harsh duty processes. An economiser gas mode reduces purge nitrogen consumption on lighter duty processes. The system can be controlled manually through the Pump Display Terminal, or via an Interface Module, iH Communications Module, or iH Single Pumpset Monitor accessory for integration with process tools.[2]
The IH 1800 is designed for processes where particulate, condensable, and corrosive by-products are present, such as PECVD and LPCVD. The system is used in load lock, transfer, metrology, lithography, PVD, RTA, strip/ashing, etching, implant source, and various CVD applications including HDP CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, and ALD.[2]
Applications for the Edwards IH 1800 include load lock, transfer, metrology, lithography, PVD process, PVD pre-clean, RTA, strip/ashing, oxide etch, silicon etch, metal etch, implant source, HDP CVD, RTP, SACVD, MOCVD, PECVD, LPCVD, and ALD.[2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| iH-1800 / iH 1800 / iH1800 | — | — | Same model name appears with minor spelling and spacing variations in the sources. | ajvs.com[2] |
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The IH 1800 system comprises an HCDP160 dry pump and an HMB1800 mechanical booster pump.[2]
The system can be controlled manually via a Pump Display Terminal, or through an Interface Module, iH Communications Module, or iH Single Pumpset Monitor accessory.[2]
The following facts about the IH 1800 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the IH 1800 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the IH 1800 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the IH 1800 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the IH 1800 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the IH 1800 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Sep 25, 2026.