SUSS MicroTec
MA200 Gen3 alternatives
Comparable Lithography equipment documented in the Waferpedia catalog.
6 comparable tools
GCA
AS200
200mm
Lithography
The GCA AutoStep 200 DSW (also known as AS200) is a 5X reduction i-line wafer stepper designed for up to 200mm wafers.
SUSS MicroTec
BA8 Gen4 Pro
200mm
Lithography
The SUSS MicroTec BA8 Gen4 Pro is a semi-automated mask alignment and wafer bonding system for 200 mm wafers, with capabilities including exposure, UV bonding, fusion bonding, imprinting, and selective plasma activation.
Nikon
NSR 2205 i 14 E 2 i-Line
200mm
Lithography
Nikon NSR 2205 i 14 E 2 is an i-line stepper.
ASML
PAS 5500
200mm
Lithography
The ASML PAS 5500/275D is a high-throughput i-line stepper with 5X reduction, 365 nm exposure, and automated wafer handling for substrates up to 200 mm diameter.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
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