Comparison ledger
Signatone CM 210, Tektronix 11401 Oscilloscope, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CM 210Signatone | 11401 OscilloscopeTektronix |
|---|---|---|
| OEM | Signatone | Tektronix |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Signatone CM 210 | Tektronix 11401 Oscilloscope |
| Specifications | ||
| Chuck XY Stage Travel Range | 205 mm x 205 mm (8.07 x 8.07 in)[1] | — |
| Chuck XY Travel Resolution (Standard) | 14 μm Per Degree of Knob Rotation[1] | — |
| Chuck XY Travel Resolution (Fine) | 1.5 μm Per Degree of Knob Rotation[1] | — |
| Chuck Z Stage Travel Range | 2.5 mm (0.01 in)[1] | — |
| Chuck Z Stage Repeatability | ± 1.0 μm[1] | — |
| Chuck Theta Stage Travel Range | ± 11° (22°)[1] | — |
| Chuck Theta Stage Accuracy | < 1.0 μm (measured at the edge of the 200 mm chuck)[1] | — |
| Probe Platen Material | Nickel Plated Steel (Aluminum optional)[1] | — |
| Probe Platen Dimensions | L = 580mm x W = 637mm x H = 12.7mm[1] | — |
| Max Number of Micro Positioners | 10x DC/HV or 2x RF + 4x DC or 4x RF + 2x DC or 2x CAP + 4x DC[1] | — |
| Contact Repeatability | < 1 μm (0.04 mils) by Manual Control[1] | — |
| Standard Wafer Chuck Diameter | 203 mm[1] | — |
| Standard Wafer Chuck Surface Planarity | ±6.5 μm[1] | — |
| Standard Wafer Chuck Rigidity | <3 μm / 10N at edge of the chuck[1] | — |
| Coax Chuck Operation Voltage | -200V to +200V DC[1] | — |
| Coax Chuck Max Voltage (Chuck to GND) | 500 V DC[1] | — |
| Coax Chuck Isolation | > 150 GΩ[1] | — |
| Triax Chuck Isolation (Force to Guard @ 10V) | > 2 TΩ[1] | — |
| System Dimensions (Optional Table) | 660 x 889 x 610 mm (26 x 35 x 24 in)[2] | — |
| System Weight (Optional Table) | 109 kg (240 lbs)[2] | — |
| System Dimensions Including Table | 863 x 1085 x 1370 mm (34 x 42.7 x 53.95 in)[2] | — |
| System Weight Including Table | 385 kg (849 lbs)[2] | — |
| Available Thermal Chuck Options | Standard Hot (25°C to 300°C), Hot/Triax (25°C to 200°C), Hot/3kV Triax (25°C to 200°C)[1] | — |
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