Comparison ledger
KLA .498 PSL Wafer, KLA Surfscan SP 2 Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 300mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .498 PSL Wafer | KLA Surfscan |
| Specifications | ||
| Configuration | NIST Traceable[1] | Includes HDD[2] |
| NIST traceability | Yes[1] | — |
| P/N | — | 0074965-000[2] |
| Handler Type | — | Vacuum 300mm/200mm[3] |
| Defect sensitivity | — | <37 nm on polished bare silicon[2] |
| Technology nodes | — | 90, 65, & 45 nm[2] |
| Inspection modes | — | Standard Throughput Inspection Mode, High Sensitivity Inspection Mode[2] |
| Illumination | — | Oblique Illumination; DF (Oblique, Normal) ST and LT Mode[3] |
| Collection | — | Wide & Narrow[3] |
| Software version | — | 5.40[3] |
| Included licenses | — | Optical Filter, Enhanced XY Coordinates, 2 mm Edge Exclusion, Standard Classification Package, LPD-N Classification, LPD-ES Classification, Grading & Sorting, Haze, Haze Analysis & Normalization, Haze Line Classification, IDM 2011 Vintage[2] |
| Operating system | — | Microsoft Windows XP[2] |
| Wafer handler | — | 300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) Ballroom Configuration; Phoenix 2.0 Handler[2] |
| Wafer size | — | Includes 300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP)[2] |
| Software vs | — | 5.40[3] |
| OEM | — | KLA[2] |
| Model | — | Surfscan SP 2[2] |
| Wafer Sizes | — | 12 inch[2] |
| Particle sensitivity | — | <37 nm defect sensitivity on polished bare silicon[2] |
| Illumination mode | — | Oblique illumination[2] |
| Included components | — | UV Laser; defect map & histogram with zoom; iMicroView measurement capability; SURFimage; Real-Time Defect Classification (RTDC); Microsoft Windows XP Operating System[2] |
| Handler | — | 300 mm Phoenix Dual FIMS Vacuum Wafer Handler (PP) Ballroom Configuration (Standard)[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →