Comparison ledger
KLA .496 PSL Wafer, Zeiss Axioscope 5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Axioscope 5Zeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | Zeiss Axioscope |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[4] | 100-240V[6] |
| Wafer size | 8 inch[4] | — |
| Traceability | NIST Traceable[4] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[4] | — |
| Category | Metrology & Inspection[5] | — |
| Transmitted light illumination | — | 10W LED or Halogen 50W[3] |
| Fluorescence light illumination | — | Colibri 3, Viluma 5/7, HXP 120[3] |
| Objective magnifications available | — | 5X, 10X, 20X, 50X, 100X[7] |
| Transmitted light power source | — | 100-240V, 50/60 Hz, 120VA[6] |
| Field of view (with ergophototube) | — | 23 mm or 25 mm[8] |
| Z focus | — | Manual[3] |
| Recommended software | — | Labscope, ZEN[3] |
| Recommended cameras | — | Color: Axiocam 208 color, Axiocam 212 color, Axiocam 305 color; Monochrome: Axiocam 202 mono, Axiocam 203 mono, Axiocam 305 mono[3] |
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