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Comparison ledger

.496 PSL WaferversusOLS 4000 3D Measuring

KLA .496 PSL Wafer, Olympus OLS 4000 3D Measuring, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .496 PSL WaferOlympus OLS 4000 3D Measuring
Specifications
ConfigurationNIST Traceable[1]—
Wafer size8 inch[1]—
TraceabilityNIST Traceable[1]—
Compatible systemsCapable on Surfscan 6xy0 and SP1[1]—
CategoryMetrology & Inspection[2]Metrology & Inspection[4]
Make—Olympus[3]
Model—OLS 4000[3]
Asset Number—71180[3]
Last Confirm Date—May 05, 2023[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]waferpedia.comwaferpedia.com