Comparison ledger
KLA .496 PSL Wafer, KLA P 16 + Profiler, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA P |
| Specifications | ||
| Configuration | NIST Traceable[1] | Refurbished[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Option | — | Stress, 3D. GEM / SECS[3] |
| Stage | — | Fully Motorized X-Y,Z, Theta, Level Stage[3] |
| Stylus | — | 2 um / 60D[3] |
| OS | — | Windows XP[3] |
| Software | — | Profiler V 7.35[3] |
| Vertical Range | — | 327 um[3] |
| Wafer Sizes | — | 2, 3, 4, 5, 6, 8, 12 inch[3] |
| Operating System | — | Windows XP[3] |
| Options | — | Stress, 3D, GEM/SECS[3] |
| Upgrade to SSD | — | Yes[3] |
| PDF Manual | — | 2011 Vintage[3] |
| Vintage | — | 2011[3] |
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