Comparison ledger
KLA .496 PSL Wafer, KLA FLX 2320 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FLX 2320 AKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | 1993– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .496 PSL Wafer | KLA FLX 2320 |
| Specifications | ||
| Configuration | NIST Traceable[1] | Thin film stress measurement system[3] |
| Wafer size | 8 inch[1] | — |
| Traceability | NIST Traceable[1] | — |
| Compatible systems | Capable on Surfscan 6xy0 and SP1[1] | — |
| Category | Metrology & Inspection[2] | — |
| Tool type | — | Thin film stress measurement system[3] |
| Wafer sizes | — | 8 inch[3] |
| Power frequency | — | 60 Hz[4] |
| Electrical supply | — | 1 Phase, 60 Hz[4] |
| Voltage | — | 115 V[4] |
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