Comparison ledger
KLA 2830 Wafer, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2830 WaferKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2830 Wafer | KLA .496 PSL Wafer |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 2830[1] | — |
| Description | Wafer Inspection System[2] | — |
| Category | Metrology & Inspection[1] | Metrology & Inspection[5] |
| Version | 300 mm[3] | — |
| Configuration | — | NIST Traceable[4] |
| Wafer size | — | 8 inch[4] |
| Traceability | — | NIST Traceable[4] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[4] |
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