Comparison ledger
KLA 1.112 PSL Wafer, Leica SP5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SP5Leica | |
|---|---|---|
| OEM | KLA | Leica |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Leica SP5 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Manual title | — | Leica SP5 Inverted Confocal Manual[3] |
| System type | — | Spectral confocal and multiphoton microscope system[4] |
| Detection module | — | SP spectral detection module[4] |
| Spectral band selection | — | Any spectral emission band in the visible range; five spectral bands can be selected simultaneously[4] |
| FLIM operation | — | Two detectors may operate as a sensor for fluorescence lifetime imaging microscopy (SP-FLIM combination)[4] |
| Confocal channels | — | Up to five confocal channels simultaneously[5] |
| Detectors | — | High dynamic sensors with low dark current PMTs[5] |
| Spectrometer | — | High efficiency prism spectrometer with loss-free band selection[5] |
| Conventional scanner features | — | True confocal point-scanning; extra large field of view (21 mm); 64 Megapixel images (8k x 8k); beam park data acquisition; spot-bleaching FRAP; zoom and pan function; slow scan mode[5] |
| Resonant scanner features | — | True confocal point-scanning; large field of view (15 mm); zoom and pan function; 16,000 lines per second; 250 frames per second; 25 frames per second 512 x 512; up to five confocal channels simultaneously[5] |
| Tandem Scanner | — | Conventional and resonant scanner in one system; switch by computer controlled super precision mechanical actuator[5] |
| Laser lines | — | 405, 458, 476, 488, 496, 514, 543, 594, and 633 nm[6] |
| Emission channels | — | Customizable to 4 channels at Boston University Cellular Imaging Core[6] |
| Microscope stands | — | Inverted stand DMI 4000/6000 CS and upright stand DM 5000/6000 CS[7] |
| Software | — | Leica Application Suite Advanced Fluorescence (LAS AF)[7] |
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