Comparison ledger
JEOL JEM-7, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | JEM-7JEOL | |
|---|---|---|
| OEM | JEOL | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | 1964 | — |
| Production run | 1964– | — |
| Lifecycle | Legacy | — |
| Lifecycle milestones | 1964 Introduction | — |
| Control system | — | — |
| Generation | — | — |
| Family | JEOL JEM-7 | KLA .496 PSL Wafer |
| Specifications | ||
| Manufacturer | JEOL[1] | — |
| Model | JEM-7[1] | — |
| Type | Electron microscope[1] | — |
| Introduced | 1964[1] | — |
| Notable feature | First electron microscope to include a mechanism for electrical adjustment of the lens axis[1] | — |
| First electronic microscope with electrical lens axis adjustment | Yes[1] | — |
| Configuration | — | NIST Traceable[2] |
| Wafer size | — | 8 inch[2] |
| Traceability | — | NIST Traceable[2] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[2] |
| Category | — | Metrology & Inspection[3] |
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